Biography
Fred Roozeboom gained his MSc (1976, chemistry, cum laude) from Utrecht University and his PhD (chemical engineering, 1980) at Twente University in The Netherlands, both in catalysis. He continued his career in catalysis with ExxonMobil in Baton Rouge, USA (1980-1982) and Rotterdam (1983).
Next, he joined Philips-Research (since 2006: NXP) in Eindhoven, The Netherlands, to work on MOCVD of III-V semiconductor lasers (1983-1988), IC metallization (1988-1990), soft-magnetic materials for magnetic recording, and “switchable mirror” hydride multilayers (1990-1996). From 1997-2009 he led a team on 3D passives and heterogeneous Si-integration for various applications (wireless communication applications, power management and digital signal processing, sensing & actuation). For this work he received the Bronze Award for ‘NXP Invention of the Year 2007’ and became NXP Research Fellow.
In 2007 he became part-time professor at TU Eindhoven. In 2009 he left NXP and joined a team at TNO-Holst Centre in Eindhoven specializing in spatial ALD. In 2014 he was elected Fellow of the Electrochemical Society ‘for pioneering work in semiconductor processing and thin-film technology’.
Since Sept. 2018 (eligible for Dutch retirement) Fred had his contract extended for a few years, and he aims at new applications in area-selective ALD, Li-ion micro-batteries, EUV optical lifetime.
Fred is co-/author of 200+ publications (h-index: 36), 5 book chapters, 35 granted US patents, and co-/editor of 45 conference proceedings on semiconductor processing. He has been or is active in organizing committees of several conferences (Materials Research Society, Electrochemical Society, American Vacuum Society) and is a member of the SEMI Europe Semiconductor Technology Programs Committee.
Topics of interest: ultrathin-film technology, plasma processing, spatial ALD, reactive ion etching, 3D passive and heterogeneous integration, RTP, microsystem technology, Li-ion micro-batteries, sensors, displays, EUV optical lifetime.
In 2014 he was elected Fellow of the Electrochemical Society ‘for pioneering work in semiconductor processing and thin film technology’. Since Sept. 2018 (eligible for Dutch retirement) Fred had his contract extended for a few years, and he will aim at new applications in area-selective ALD, Li-ion micro-batteries, EUV optical lifetime.
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